Engineering services

Engineering Services for optimizing sputtering processes

We have acquired a typical know-how in static magnetic fields optimisation for magnetron coaters. Feeling that a lot of trouble in sputtering process is due to static magnetic field circuit and that the overall productivity of a coater can be improved by optimising the magnetic arrays, we have developed specific tools to simulate and optimize magnetrons.

We can offer services like:

• On site Magnetic field diagnosis with our 3D Magnetic Mapping Machine
• Shunt insertion, and optimisation
• Design of specific magnet arrays, to increase electron bombardment, target usage, …

With the 3D Magnetic Mapping Machine, we have developed software to analyze the magnetic field, and simulate the coating uniformity.

The result is displayed as a 2D or 3D curve, showing areas where magnetic field has to be tuned.

This feature makes the tuning of rotatable magnet bars much easier, and allows less productivity losses in magnet bar tuning.